发明名称 SCREW CONVEYOR MECHANISM, AND DISC CLEANING DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a screw conveyor mechanism in which discs can be easily carried out of equipment by carrying discs by a screw conveyor in the equipment, and disc handling arms of similar forms can be used on a loader side and an unloader side, and a disc cleaning device using that. SOLUTION: Pitch-enlarged grooves of pitches larger than a prescribed pitch are formed at respective screw shafts to correspond to a disc unloader position arranged on the disc feed target side. The length of the part of the enlarged groove in the disc feeding direction is set enough for a handling arm for carrying out the discs to be inserted. A plurality of the screw shafts are disposed at such an interval that the handling arm can be inserted. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008024446(A) 申请公布日期 2008.02.07
申请号 JP20060199253 申请日期 2006.07.21
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SHIZAWA NORITAKE
分类号 B65G33/06;B08B3/04;H01L21/304 主分类号 B65G33/06
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