发明名称 |
SCREW CONVEYOR MECHANISM, AND DISC CLEANING DEVICE USING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a screw conveyor mechanism in which discs can be easily carried out of equipment by carrying discs by a screw conveyor in the equipment, and disc handling arms of similar forms can be used on a loader side and an unloader side, and a disc cleaning device using that. SOLUTION: Pitch-enlarged grooves of pitches larger than a prescribed pitch are formed at respective screw shafts to correspond to a disc unloader position arranged on the disc feed target side. The length of the part of the enlarged groove in the disc feeding direction is set enough for a handling arm for carrying out the discs to be inserted. A plurality of the screw shafts are disposed at such an interval that the handling arm can be inserted. COPYRIGHT: (C)2008,JPO&INPIT
|
申请公布号 |
JP2008024446(A) |
申请公布日期 |
2008.02.07 |
申请号 |
JP20060199253 |
申请日期 |
2006.07.21 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
SHIZAWA NORITAKE |
分类号 |
B65G33/06;B08B3/04;H01L21/304 |
主分类号 |
B65G33/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|