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发明名称
VAKUUMBEHANDLUNGSKAMMER FÜR SEHR GROSSFLÄCHIGE SUBSTRATE
摘要
申请公布号
AT391339(T)
申请公布日期
2008.04.15
申请号
AT20050803234T
申请日期
2005.11.23
申请人
OC OERLIKON BALZERS AG
发明人
AING, PHANNARA;DELAUNAY, LAURENT;JOST, STEPHAN;ELYAAKOUBI, MUSTAPHA
分类号
H01J37/32;C23C16/458;C23C16/509
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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