SYSTEM AND METHOD FOR CONTROL SEMICONDUCTOR EQUIPMENT

摘要

A semiconductor equipment control system and a control method thereof are provided to prevent unconditional checking of a process recipe body and ensure more efficient manufacturing process by respectively checking a final modification time of a process recipe for each processing chamber of the semiconductor equipment. A semiconductor equipment control system(100) comprises semiconductor equipment(130) having a process recipe(136) stored therein, and a host(110) having a database(115) with a reference recipe stored therein. The host is connected to the semiconductor equipment through a network(120), and compares a final modification time of the process recipe with a final modification time of the reference recipe. If the final modification time of the process recipe is different from the final modification time of the reference recipe, the host checks a recipe body of the process recipe, and if the final modification time of the process recipe is equal to the final modification time of the reference recipe, the process is advanced according to the process recipe.