发明名称 System and method for providing modified illumination intensity
摘要 A system and method utilize a birefringence inducer to induce or change birefringence of an optical element to change an index of refraction within the optical element to produce a polarization-retarded light beam that passes through the optical element. The optical element can include one or more optical plates or adjustable optical compensators. The birefringence inducer can apply external forces on the optical element, such as mechanical, electrical, magnetic, or acoustical forces. A linear polarizer polarizes the output beam from the optical element to produce a linear polarized modified intensity light beam with a desired intensity distribution. A control system for controlling the inducing of birefringence can include an intensity detector and controller, and can provide a control signal to the birefringence inducer.
申请公布号 US7403267(B2) 申请公布日期 2008.07.22
申请号 US20050094313 申请日期 2005.03.31
申请人 ASML NETHERLANDS B.V. 发明人 DE JONGE ROEL
分类号 G03B27/72;G02B5/30;G03B27/32;G03B27/42;G03B27/54 主分类号 G03B27/72
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