PROBE CARD AND METHOD THEREOF

摘要

An MEMS(Micro Electro Mechanical System) probe card of bridge type and manufacturing method thereof are provided to reduce a manufacturing cost by simplifying a manufacturing process of a probe card. A method of an MEMS probe card of a bridge type comprises the following steps: a step for successively evaporating a Si3N4(14), a Au(16), and a PR(Photo Resist, 18) on a silicon substrate(12); and a step for making the silicone substrate etching and/or depositing in a location corresponding to a plurality of masks. A probe is supported with a bridge type in a cavity of the silicone substrate by etching and/or depositing.