发明名称 METHOD AND APPARATUS FOR FEBRICATION OF THIN FILM TYPE SOLAR CELL
摘要 <p>PURPOSE: A method and an apparatus for manufacturing a thin film solar cell are provided to reduce a time for an edge isolation process by performing the edge isolation process on a substrate through a laser scribing process. CONSTITUTION: A substrate loader(600) loads a substrate on which a plurality of unit solar cells are formed. A first edge isolation unit(610) radiates a first laser on the edge part of the loaded substrate. A first edge isolation recess with a first width is formed. A second edge isolation unit(630) radiates a second laser inside the first edge isolation recess. A second edge isolation recess with a second width is formed. A substrate unloader(640) unloads the substrate on which the second edge isolation recess is formed to the outside.</p>
申请公布号 KR20100021033(A) 申请公布日期 2010.02.24
申请号 KR20080079729 申请日期 2008.08.14
申请人 JUSUNG ENGINEERING CO., LTD. 发明人 CHO, WON TAE;LIM, GUN MOOK
分类号 H01L31/0445;H01L31/18 主分类号 H01L31/0445
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