METHODS OF MANUFACTURING A GRAPHITE LAYER

摘要

Described is a method for manufacturing a pellicle having a graphite layer, which includes: preparing a substrate; forming a membrane by performing a CVD process on the substrate; separating the membrane from the substrate in a first solvent; rinsing the separated membrane in a second solvent; and transferring the separated membrane onto a frame in a third solvent. So, the pellicle for an extremely ultra violet light photolithography process can be provided.