METHOD FOR TESTING THE FUNCTIONALITY OF A ROTATION RATE SENSOR

摘要

A method for testing the functionality of a rotation rate sensor, the rotation rate sensor including a substrate and a micromechanical structure oscillatory with respect to the substrate having a first drive element, a second drive element and at least one Coriolis element, the Coriolis element being excitable to at least one oscillation mode by the first drive element and/or by the second drive element, a detection signal being detected as a function of a force action to be detected on the Coriolis element, the rotation rate sensor being operable optionally in a normal mode or in a self-test mode, the first drive element and the second drive element being driven in the normal mode, characterized in that in the self-test mode, the first drive element or the second drive element is driven optionally exclusively.

主权项

1. A method for testing a functionality of a rotation rate sensor, the method comprising:
exciting at least one Coriolis element of the rotation rate sensor to at least one oscillation mode by a first drive element and/or by a second drive element, wherein the rotation rate sensor includes a substrate and a micromechanical structure oscillatory with respect to the substrate having the first drive element, the second drive element and the at least one Coriolis element; and detecting a detection signal as a function of a force action to be detected on the Coriolis element, the rotation rate sensor being operable optionally in a normal mode or in a self-test mode, the first drive element and the second drive element being driven in the normal mode; wherein in the self-test mode, the first drive element or the second drive element is driven optionally exclusively.