| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas purge unit and a gas purge device capable of performing uniform gas replacement in a container, without obstructing the movement of a robot arm.SOLUTION: A gas purge unit 20 introduces a purification gas into a purge object container 2 having an opening 2b through the opening 2b. The gas purge unit 20 has a top nozzle member 22a in which a top nozzle port 26a for blowing the purification gas from the top part 13b of an opening 13 toward the inside of the container 2 is formed, and a bottom nozzle member 22b in which a bottom nozzle port 26b for blowing the purification gas from the bottom part 13c of the opening 13 toward inside of the container 2 is formed.SELECTED DRAWING: Figure 3D |
