发明名称 APPARATUS FOR PRODUCING METALLIC PARTICLE
摘要 <P>PROBLEM TO BE SOLVED: To continuously mass-produce metallic particles of Si or the like. <P>SOLUTION: Molten Si is stored in a crucible 208 with a nozzle hole 218 formed at the bottom part 265. A pressure is acted on a space 266 in the upper direction of the molten Si by a gas, and the molten Si is dropped from the nozzle hole 218. The crucible 208 consists of a material containing one or more kinds selected from the group consisting of hexagonal BN, and cubic BN, Si<SB>3</SB>N<SB>4</SB>, TiB<SB>2</SB>and ZrB<SB>2</SB>. The gas is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr and Xe. The inside diameter D3 of the nozzle hole is 0.05 to 2.0 mm. The length L3 is 1 to 30 times the inside diameter of the nozzle hole. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003306706(A) 申请公布日期 2003.10.31
申请号 JP20020116714 申请日期 2002.04.18
申请人 CLEAN VENTURE 21:KK 发明人 YAMAGUCHI YUKIO;KATO KENJI;MIYAZAKI MASAKI
分类号 C04B35/00;B22F9/08;C30B29/06;H01L31/04 主分类号 C04B35/00
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