| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a clamp device capable of easily maintaining a surface zone contamination-free which largely affects precision of a relative position of a workpiece support base to a clamp chuck. <P>SOLUTION: This clamp device comprises the clamp chuck 1 and the workpiece support base 10. The workpiece support base 10 comprises a bottom part flat surface 10a and a clamp pin 11. The clamp chuck 1 comprises a center opening 2 provided with a conical insertion part 3 and a clamp mechanism. The clamp pin 11 is provided with a rear part adjacent to the bottom part flat surface 10a of the workpiece support base 10. The rear part comprises a plurality of exposed surface parts 12 and 12a to be engaged with the conical insertion part 3 in the center opening 2 for aligning the clamp pin 13 in the X- and/or a Y-directions. The clamp chuck 1 has an opening 6 to be positioned inside the conical insertion part in the center opening for blowing gaseous medium to the exposed surface parts to clean the surface when the clamp pin 11 is inserted into the center opening 2 in the clamp chuck. <P>COPYRIGHT: (C)2003,JPO</p> |
