发明名称 LIGHTING DEVICE FOR IMAGE PROCESSING TYPE MEASURING MACHINE
摘要 <P>PROBLEM TO BE SOLVED: To provide a lighting device for an image processing type measuring machine that can realize stable lighting stabilized in lightness and a color tone of light. <P>SOLUTION: This lighting device for an image-processing type measuring machine having a lighting optical system including a light source, and for measuring a dimension and a shape of a measured object, based on an image of the measured object provided by irradiating the measured object with light from the optical system is provided with tables 64, 65 stored with a relation between lightness obtained in the optical system and an electric current flowing in the light source at that time, and a control means (CPU 51) for controlling the current flowing in the light source to bring the lightness provided in the optical system to a preliminarily set set value, based on the relation between the lightness stored in the tables 64, 65 and the electric current. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003269919(A) 申请公布日期 2003.09.25
申请号 JP20020065997 申请日期 2002.03.11
申请人 MITSUTOYO CORP 发明人 MORIUCHI EISUKE;SHIMOKAWA SEIJI;AKAGI TAKAHARU
分类号 G01B11/02;G01B11/24;G01J1/42;G02B21/06;H01L33/58;H01L33/60 主分类号 G01B11/02
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