| 摘要 |
PURPOSE: A liquid crystal display device, a method for fabricating the same, and a method for recycling an alignment film by the same are provided to remove an alignment film without any damage of a first protecting film by forming a second protecting film with a selective etching ratio different from the alignment film. CONSTITUTION: A liquid crystal display device includes an organic insulating film as a first protecting film(68) formed on a substrate, an alignment film(74) formed on the organic insulating film, and the SiNx layer as a second protecting film(84) formed on the organic insulating film with different etching conditions from the alignment film, wherein the alignment film is removed by dry type etching by using mixture gas of SF6, O2, O2+Cl2, CF4, etc. |
