| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for positioning with high precision without relying on the density or shape of a pattern in comparison inspection for comparing a picture to be inspected with a reference picture to detect a defect by the difference. SOLUTION: The picture to be inspected and the reference picture are respectively divided into a plurality of areas, each position deviation amount is respectively calculated among division pictures and the position deviation amount of the whole picture is decided through the use of only the position deviation amount with high reliability among the plurality of position deviation amounts. Then positioning with high precision is performed regardless of the density or shape of the pattern, the largeness of inter-picture brightness difference and the largeness of brightness non-uniformity in the picture. Besides, positioning precision is monitored so that a detection sensitivity is adjusted as necessary. |
