摘要 |
PURPOSE:To obtain an element for measuring the degree of thermal conduction which has a given resistance value, and neverthless, eliminates the need for a measuring room having a large capacity, by a method wherein a resistor, which engages the end part of a perforation in a substrate having the perforation formed in its plate surface, is set in a bridge form. CONSTITUTION:An element consists of a glass substrate 6, having a perforation 7 formed in its plate surface, and a comb theethed-resistor 8 which engages the end part of the perforation 8 and is set in bridge. The opposite ends 9 and 10 of the resistor 8 are connected to another element and circuit at the end part of the substrate 6. Using said element for measuring the degree of thermal conduction, a measured gas flow path containing the perforation 7 is formed to assume the form of a detector. For example, a wheatstone bridge consists of two elements and two resistors, and a power source is prepared. One perforation forms a measuring chamber while the other perforation forms a reference chamber, and this permits the formation of a detector. The measuring chamber can consist of the perforation by itself, whereby it is decreased in an inside measurement and increased in reponsiveness. Additionally, the formation of the resistor in a pectinate-shape permits a given resistance value to be easily obtained. |