发明名称 METHOD OF REMOVING SEMICONDUCTOR CHIP FROM DICING FILM
摘要 <p>Semiconductor chips, which have been diced, can be removed from the conductive adhesive/polymer support film holding them, without leaving residual adhesive on the film if the wafer/adhesive support film laminate is heated prior to the dicing step. The heating step increases the release characteristics between the adhesive and film.</p>
申请公布号 JPS60136331(A) 申请公布日期 1985.07.19
申请号 JP19840248846 申请日期 1984.11.27
申请人 STAUFFER CHEM CO 发明人 JIYOSEFU ANSONII OORITSUCHIYO
分类号 H01L21/683;B28D5/00;H01L21/00;H01L21/301;H01L21/302;H01L21/52;H01L21/67;H01L21/68 主分类号 H01L21/683
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