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经营范围
发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH03239319(A)
申请公布日期
1991.10.24
申请号
JP19900035517
申请日期
1990.02.16
申请人
NIPPON TELEGR & TELEPH CORP <NTT>;HAKUTOU KK;N S:KK
发明人
TAGO AKIO;YANAGISAWA KEIICHI;HASHINO SOUJIROU;NOBUKIYO TOSHITO
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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