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发明名称
FOREIGN OBJECT INSPECTING DEVICE
摘要
申请公布号
JPH04109108(A)
申请公布日期
1992.04.10
申请号
JP19900226544
申请日期
1990.08.30
申请人
TOSHIBA CORP
发明人
IMI TETSUSHI
分类号
G01B11/08;G01B11/30;H01L21/66
主分类号
G01B11/08
代理机构
代理人
主权项
地址
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