| 摘要 |
PURPOSE:To improve the work efficiency in a patterning process by boring a reference hole in a substrate after laminating a dry film on the substrate. CONSTITUTION:After covering both the surface and the rear of a substrate with copper foils, and roughening the surfaces of the copper foils, and dry films 2 are laminated on both the surface and the rear. Next, a reference hole is bored in the substrate 1 by a punch 31. And it is set, together with a photomask, on the reference pin equipped in a jig for exposure in the exposure process in the next process as it is. Hereby, the boring of the reference hole and the excision of the part which blockades the reference hole of the dry film can be performed at the same time, and the excision work of the dry film, which we were relying on the manual work, becomes needless, and the work efficiency improves. |
