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发明名称
VAPOR GROWTH REACTION APPARATUS
摘要
申请公布号
JPH04325682(A)
申请公布日期
1992.11.16
申请号
JP19910123034
申请日期
1991.04.26
申请人
NISSHIN STEEL CO LTD
发明人
SUZUKI SATOSHI;SASAKI YASUSHI
分类号
C23C16/44;C23C16/455
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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