| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive sensor and a method for correcting the position offset of the capacitive inertia sensor. SOLUTION: An inertial sensor (1') of this invention is made of semiconductive material, and contains a stator (2) and a rotor (4) connected to each other electrostatically, and a microactuator (24) which is made of semiconductive material also, connected to the rotor 4, and controlled so as to move the rotor 4 itself and correct the position offset of the rotor (4). |
