| 摘要 |
<p>PURPOSE:To improve a production yield by adjusting N2 to a prescribed purity with a filter provided in the insertion part for a cassette and ionizing the N2 with a corona discharge by an ion bar which is provided in the outlet of the filter and is inserted with needle-shaped metallic electrodes. CONSTITUTION:The N2 3 is adjusted to the prescribed purity by the filter 4 provided in a flow passage and is introduced to the ion bar 5 inserted with the needle-shaped metallic electrodes. A prescribed AC voltage is impressed to the ion bar 5 to generate N ions by the corona discharge and to increase the electric conductivity of the N23 by >=3 digits. The N2 3 ionized by the ion bar 5 is then blown to the front surface of a substrate 1 and the cassette 6 and the potential is rapidly lowered to remove static electricity, by which the destruction and deterioration of the elements and the adhesion of particles are prevented and the production yield is improved.</p> |
