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经营范围
发明名称
Cathodic sputtering apparatus.
摘要
申请公布号
EP0411256(B1)
申请公布日期
1994.03.02
申请号
EP19900109079
申请日期
1990.05.14
申请人
KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH
发明人
HILZ, GABRIELA;WALTER, STEFAN
分类号
C23C14/34;C23C14/50;C23C14/56;(IPC1-7):C23C14/34;B25J19/00;H01J37/34;C23C14/04
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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