| 摘要 |
PROBLEM TO BE SOLVED: To cope with enlarging of size in a workpiece without enlarging size of a polishing device. SOLUTION: In a polishing device 1 provided with a plurality of carriers 7A provided between an outer ring 4 and a sun gear 6A to be meshed with an inner tooth 3 of the outer ring 4 and the sun gear 6A to rotate around while rotating on its own axis and a pair of upper/lower surface plates 9A, 10A rotated with a center shaft 5 of the outer ring 4 serving as the center to polish an upper/lower surface of a workpiece 8A held to the carrier 7A, the sun gear 6A is removably mounted through a first mounting/demounting member 13A in a first drive shaft 12 rotated to be driven with the center shaft 5 serving as the center, the surface plate 9A in an upper part is removably mounted through a second mounting/demounting member 15A in a second drive shaft 14 rotated to be driven with the center shaft 5 serving as the center, and the surface plate 10A in an lower part is removably mounted through a support disk 17 in a third drive shaft 16 rotated to be driven with the center shaft 5 serving as the center. |
