| 摘要 |
PURPOSE: A plasma display device removes an inferiority cause generated by a bus electrode, does not require a bus electrode, forms the second and third electrode as a conductive metal, and reduces an electrode production cost. CONSTITUTION: A plasma display device includes a first electrode(31) which is buried undera dielectric substance(32) on a back substrate(30), and is formed as a predetermined pattern. A front substrate(60) is connected to the back substrate, and forms a discharge space. The second and third electrodes(61,62) are formed as a predetermined pattern on a lower surface of the front substrate facing the first electrodes, and make a predetermined angle with the first electrodes. Auxiliary electrodes(70) are adjacent to the second and third electrodes. Thereby, the plasma display panel for manufacturing a semiconductor element has a side rinse nozzle, and reduces a photoresist deposition time on a wafer. |
