| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid controller which can singly perform two-stage adjusting of a flow amount. SOLUTION: In this fluid controller 1, a valve bar moving means 8 for moving a valve bar 5 by a specified rate against energizing force of an elastic member 7 has followings. A disc-like fixation piston 17 is vertically unmovably attached to the valve bar 5. A cylindrical movable piston 18 is vertically movably attached to the valve bar 5. A fixation piston driving means 19 moves the fixation piston 17 against the energizing force of the elastic member 7. A movable piston driving means 20 moves the movable piston 18 whereby the fixation piston 17. A movable stopper 21 is arranged on top of the movable piston 18 for stopping the valve bar 5 at a specified position. A fixation stopper 14 is arranged on a fixation position of the fluid controller 1 for stopping the valve bar 5 at the specified position. It is thus possible to locate the valve bar 5 at one of a closing position, an opening position for a large flow amount, and an opening position for a small flow amount therebetween.
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