| 摘要 |
PROBLEM TO BE SOLVED: To enhance degassing efficiency without using nitrogen as sweeping gas and increasing the capacity of vacuum pump by constituting sweeping gas and effective gas of the same gas, pref., hydrogen or ozone gas. SOLUTION: A functional water making apparatus 20a has a gas-liquid separation membrane module 1 for degassing ultrapure water, a gas-liquid separation module for dissolving gas and a gas supply source 4. The gas supply piping 10 extended from the gas supply source 4 is branched into the effective gas supply pipe connected to the inlet on the gas side of the dissolving gas-liquid separation membrane module 2 and the sweeping gas supply pipe 13 connected to the inlet on the liquid side 11 of the degassing gas-liquid separation membrane module l. Since effective gas is hydrogen or ozone gas, nitrogen gas is not used as sweeping gas and, in a degassing process, the capacity of a vacuum pump 3 is as it is and atmospheric components such as oxygen, nitrogen, carbon dioxide or the like can be almost removed and degassing efficiency can be enhanced.
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