Catadioptric objective comprising two intermediate images

摘要

A catadioptric objective of axial symmetry with two intermediate images achieving high resolution and to be used advantageously in the VUV region for microscopy or microlithography. The objective comprises a first refractive partial objective (S1) which generates a first intermediate image in the central bore of a mirror (M2), a catadioptric second partial objective (S2) which generates a second intermediate image in the central bore of a mirror (M1) and a third refractive partial objective (S3) which generates the final image (Im). <IMAGE>