发明名称 METHOD FOR FORMING END FACE OF SEMICONDUCTOR LAYER AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To enable forming a light radiating end face of a semiconductor light-emitting element, using a nitride III-V compound semiconductor by cleavage, without having to use an expensive substrate such as an SiC substrate or the like, to enable fetching of an electrode from both upper and lower surfaces and to eliminate faults in operation. SOLUTION: A method for forming the end face of a semiconductor layer comprises the steps of laminating GaN semiconductor layers in a multiplayer manner on a C-plane sapphire board 1 to form a laser structure, and then forming an Ni/Au film 7 thereon. The method further comprises the step of forming an Ni/Au/In film 9 on a p-type GaP substrate 8 of a plane orientation (100). The method also comprises the steps of connecting the GaN semiconductor layer on the board 1 to the substrate 8 via the film 7 and the film 9, so that easy directions of cleavage for the semiconductor layer and the substrate coincide, then removing the board 1, cleaving the substrate 8 along the its easy direction of cleavage, thereby cleaving the semiconductor layer to form the end face of a resonator.
申请公布号 JP2001313436(A) 申请公布日期 2001.11.09
申请号 JP20010127483 申请日期 2001.04.25
申请人 SONY CORP 发明人 KAWAI HIROHARU
分类号 H01S5/02;H01S5/323;H01S5/343;(IPC1-7):H01S5/02 主分类号 H01S5/02
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