发明名称 MOLD, WORKING APPARATUS USING MOLD AND WORKING METHOD USING MOLD
摘要 PROBLEM TO BE SOLVED: To decrease deformation of a mold and a workpiece and enable transferring a shape with good precision. SOLUTION: The working apparatus for fabricating the workpiece with the mold has a first support member supporting the mold, a second support member arranged to face to the first support member, and a means for fabricating the work piece by pressing the mold and the workpiece with the support members wherein a recessed portion is formed in at least one of the surface of the mold supported by the support members, the surface of the first support member supporting the mold and the surface of the second support member supporting the workpiece. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005231247(A) 申请公布日期 2005.09.02
申请号 JP20040044727 申请日期 2004.02.20
申请人 CANON INC 发明人 SEKI JUNICHI;DEN TORU
分类号 B81C99/00;B29C35/00;B29C59/02;G03F7/00;H01L21/027;(IPC1-7):B29C59/02;B81C5/00 主分类号 B81C99/00
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