发明名称 |
ABSORBING COMPOUNDS FOR SPIN-ON GLASS ANTI-REFLECTIVE COATINGS FOR PHOTOLITHOGRAPHY |
摘要 |
<p>An absorbing ether-like compound including a siliconethoxy, silicondiethoxy, or silicontriethoxy species attached to a naphthalene or anthracene chromophore via an oxygen linkage is used as an organic light-absorbing compound. The absorbing ether-like compound is incorporated into spin-on gla ss materials to provide anti-reflective coating materials for deep ultraviolet photolithography. A method of synthesizing the light-absorbing ether compoun ds is based on the reaction of an alcohol-substituted chromophore with an acetoxysilicon compound in the presence of alcohol. A method of making absorbing spin-on-glass materials including the absorbing ether-like compoun ds is also provided.</p> |
申请公布号 |
CA2413726(C) |
申请公布日期 |
2005.11.29 |
申请号 |
CA20012413726 |
申请日期 |
2001.07.12 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
WU, HUI-JUNG;SPEAR, RICHARD;BALDWIN, TERESA;DRAGE, JAMES;RICHEY, MARY |
分类号 |
G03F7/11;C03C17/30;C07F7/18;C08K5/5415;C08L83/05;C09D4/00;C09D183/04;H01L21/027;(IPC1-7):C07F7/18;C08L83/04;C08L83/06 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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