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发明名称
APPARATUS FOR DETECTING SLOPE OF WAFER CARRIER
摘要
申请公布号
KR20050111943(A)
申请公布日期
2005.11.29
申请号
KR20040036877
申请日期
2004.05.24
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KWAK, DAE YONG
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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