Nickel stamp structure for providing easy formation of self-assembled monolayer as anti-stiction layer, and manufacturing method thereof,申请号KR20050076523-传众专利搜索

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发明名称	Nickel stamp structure for providing easy formation of self-assembled monolayer as anti-stiction layer, and manufacturing method thereof
摘要
申请公布号	KR100693992(B1)	申请公布日期	2007.03.12
申请号	KR20050076523	申请日期	2005.08.20
申请人		发明人
分类号	G03F7/00;H01L21/027	主分类号	G03F7/00
代理机构		代理人
主权项
地址

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