OPTICAL THIN FILM, OPTICAL DEVICE AND METHOD FOR PRODUCING SAME
摘要
<p>Disclosed is an optical thin film wherein a hydrogenated carbon film mainly containing at least carbon and hydrogen is formed on a substrate and at least one protective layer composed of any one of an oxide film, a nitride film, an oxynitride film, a fluoride film and a film mainly containing hydrogen and carbon is formed on the hydrogenated carbon film.</p>
申请公布号
WO2007049581(A1)
申请公布日期
2007.05.03
申请号
WO2006JP321103
申请日期
2006.10.24
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.;ODA, KAZUHIKO;MATSUURA, TAKASHI;AKAHANE, YOSHIHIRO;USHIRO, TOSHIHIKO;IMAI, TAKAHIRO
