Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus

摘要

A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate. The apparatus includes an optical element, and at least two clamping assemblies for clamping the optical element. The clamping assemblies each include a first clamp with a first clamping surface in contact with a first surface of the optical element and a second clamp with a second clamping surface in contact with a second surface of said optical element, opposite said first surface of said optical element.