| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To preferably monitor a dew point temperature of an air cleaning apparatus for feeding air of an ultra low dew point temperature; to previously detect abnormal rising of the dew point temperature; and to previously prevent air of a high dew point temperature from being discharged from an outlet of the cleaning apparatus. <P>SOLUTION: In an adsorption apparatus filled with an adsorbent, air close to an outlet between an inlet and the outlet in a cylinder body 12a is sampled by a drawing out pipe 21. The dew point temperature of the sampled air is measured by a dew point thermometer 33 and a measurement value is output to a control apparatus 41. When the measurement value exceeds a threshold value, the control apparatus 41 operates an alarm apparatus 42. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
