LASER BEAM FUSION-CUTTING METHOD OF BRITTLE MEMBER TO BE WORKED

摘要

PROBLEM TO BE SOLVED: To provide a laser beam fusion-cutting method capable of effectively preventing degradation of the strength of a product caused by generation of microcracks.

SOLUTION: When performing fusion cutting of a silicon wafer, a thin plate glass or the like by using a laser beam fusion-cutting method, the laser beam irradiation starting positions PSand PEwhen the fusion cutting is started and ended are set outwardly apart from an outer periphery of a product area where a product 51A is formed after the fusion cutting.

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