摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable tuning fork type piezoelectric vibrator in which defects such as a short circuit and contact between electrodes nearby a bottom surface of a fork portion of a tuning fork are reduced, and also to provide a piezoelectric vibrating device using the vibrator, and a piezoelectric oscillator using the piezoelectric vibrating device. SOLUTION: The tuning fork type piezoelectric vibrator includes: a vibrator base portion 13 provided with a base electrode for external connection; vibrator arm portions 11 and 12 projected in a tuning-fork shape from the vibrator base portion 13; a groove portion formed on at least one of the top surface and rear surface of the vibrator arm portion; groove electrodes 11ae and 12ae provided in the groove portion; side face electrodes 11be and 12be provided on side faces of the vibrator arm portions where the groove portion is not formed; a first connection electrode 13e5 connecting the base electrode to the side face electrodes or groove electrodes; and a second connection electrode 13e6 connecting the groove electrodes to the side face electrodes. In this case, the side face electrodes are provided at a predetermined distance from the bottom surface of the fork portion of the tuning fork of the vibrator base portion. COPYRIGHT: (C)2008,JPO&INPIT
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