| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment furnace for a flat plate-shaped member, which efficiently performs heat treatment of the flat plate-shaped member without deforming and damaging the same. SOLUTION: A floating gas jetting means 4 is disposed on a floor surface of a furnace chamber 2 to float and retain the flat plate-shaped member P, and the flat plate-shaped member is conveyed in the furnace longitudinal direction. A temperature of a floating gas is changed in the furnace longitudinal direction to apply prescribed temperature history to the flat plate-shaped member P floated and retained by the floating gas. The jetting means 4 is composed of a chamber 3 having pores on its top face. The temperature distribution can be also controlled even in the furnace width direction if the chamber 3 divided into the furnace width direction is used. COPYRIGHT: (C)2008,JPO&INPIT
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