COATING TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND COATING TREATMENT APPARATUS

摘要

PURPOSE: A coating treatment method, a computer-readable storage medium, and a coating treatment apparatus are provided to reduce a supply volume of a coating agent while coating a coating agent on the substrate evenly. CONSTITUTION: A coating treatment method is comprised of the steps: supplying a processing liquid having a first surface tension to a central part of a substrate(S1); supplying a coating agent having a second surface tension lower than the first surface tension to the central part of the processing liquid provided from the first process(S2); turning a substrate and supplying the coating agent to the central part of the solvent supplied from the second process(S3); and diffusing processing liquid and solvent on the substrate and distributing them on the whole substrate(S4).