| 摘要 |
PROBLEM TO BE SOLVED: To drive a stage with high accuracy.SOLUTION: At exposure, positional information of a stage WST is measured by a Y head 64 and an X-head 66 which are respectively opposing to Y scales 39Yand 39Y, and X scales 39Xand 39X. Movement of the stage WST is controlled while a measurement error (Abbe error) of an encoder system generated due to a difference (Abbe deviation amount) in height of a surface of each scale with respect to a reference plane of the stage WST is being compensated based on measurement information on the encoder system including the heads 64 and 66.SELECTED DRAWING: Figure 3 |
