发明名称 BARREL FEED STRUCTURE OF A PLURALITY OF BARREL LASER BEAM MACHINE
摘要 PROBLEM TO BE SOLVED: To provide a barrel feed structure of a plurality of barrels laser beam machine which is capable of improving the machining accuracy and increasing the degree of freedom in the machining. SOLUTION: A barrel feed structure of a plurality of barrels laser beam machine is basically provided with a main spindle 30 provided in the Y-axis direction astride a table 11 movable in the X-axis direction on which a work id placed, a main movable piece 40 which is movable on the spindle 30, and to which a main barrel 41 optically connected to a laser beam oscillator is fixed, and a sub movable piece which is movably supported by the main movable piece 40 in the Y-axis direction, and supports at least one sub barrel optically connected to the laser beam oscillator, a bar-shaped stator with straight- arranged magnets built therein are provided on the main movable piece 40 in the Y-axis direction, the sub movable piece with a soil built therein is supported on the stator to form a linear motor by the stator and the sub movable piece, and the sub barrel fixed to the sub movable piece is moved in the Y-axis direction with respect to the main barrel.
申请公布号 JP2000225484(A) 申请公布日期 2000.08.15
申请号 JP19990027633 申请日期 1999.02.04
申请人 FINE MACHINING KK 发明人 ISHIYAMA NORITAKA
分类号 B23K26/08;H01L21/268 主分类号 B23K26/08
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