发明名称 半導体装置の製造方法
摘要 A method of manufacturing a semiconductor device includes: forming a first trench in a first area of a drift layer that has a surface including the first area and a second area; growing a crystal of a p-type base layer on a surface of the drift layer after forming the first trench; and growing a crystal of an n-type source layer on a surface of the base layer. Material of the drift layer, the base layer, and the source layer are a wide-gap semiconductor.
申请公布号 JP5961563(B2) 申请公布日期 2016.08.02
申请号 JP20130011918 申请日期 2013.01.25
申请人 株式会社豊田中央研究所;トヨタ自動車株式会社;株式会社デンソー 发明人 青井 佐智子;渡辺 行彦;鈴木 克己;水野 祥司
分类号 H01L29/12;H01L21/336;H01L29/78 主分类号 H01L29/12
代理机构 代理人
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