FLOW METER AND FLOW CONTROL DEVICE PROVIDED THEREWITH

摘要

A flow meter includes an inlet side switching valve, an outlet side switching valve on a downstream of the inlet side valve, and a control valve on a downstream of the outlet side valve that are connected with each other by flow passages having internal volumes, a pressure sensor on an upstream side of the control valve, and a larger flow rate measuring section for calculating a flow rate based on a build-down volume of an internal volume of the passage between an outlet of the inlet side valve and an inlet of the control valve, and a smaller flow rate measuring section for calculating a flow rate based on a build-down volume of an inner capacity of the passage between an outlet of the outlet side valve and the inlet of the control valve.

主权项

1. A flow meter, comprising an inlet side opening and closing switching valve provided on a flow passage, an outlet side opening and closing switching valve provided to a downstream side of the inlet side opening and closing switching valve, and a control valve provided to a downstream side of the outlet side opening and closing switching valve that are connected with each other by flow passages having internal volumes, and a pressure sensor provided to an upstream side of the control valve,
wherein the flow meter also comprises a larger flow rate measuring section for calculating a flow rate based on a build-down volume which is an internal volume of the flow passage between an outlet side of the inlet side opening and closing switching valve and an inlet side of the control valve, and a smaller flow rate measuring section for calculating a flow rate based on a build-down volume which is an inner capacity of the flow passage between an outlet side of the outlet side opening and closing switching valve and the inlet side of the control valve.