发明名称
摘要 A silicon carbide semiconductor device is disclosed which includes a silicon carbide single-crystal layer and at least one ohmic electrode in contact with the silicon carbide single-crystal layer, wherein the ohmic electrode is made of a titanium-aluminum alloy. Also disclosed is a method of producing the silicon carbide semiconductor device.
申请公布号 JP2509713(B2) 申请公布日期 1996.06.26
申请号 JP19890272629 申请日期 1989.10.18
申请人 SHARP KK 发明人 FURUKAWA MASAKI;SUZUKI AKIRA;FUJII YOSHIHISA
分类号 H01L21/285;H01L21/04;H01L21/28;H01L29/24;H01L29/43;H01L29/45;(IPC1-7):H01L29/43 主分类号 H01L21/285
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