VERFAHREN UND EINRICHTUNG ZUR IONENGESTUETZTEN BESCHICHTUNG ELEKTRISCH ISOLIERENDER SUBSTRATE,申请号DE19813142900-传众专利搜索

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发明名称	VERFAHREN UND EINRICHTUNG ZUR IONENGESTUETZTEN BESCHICHTUNG ELEKTRISCH ISOLIERENDER SUBSTRATE
摘要
申请公布号	DE3142900(A1)	申请公布日期	1982.08.05
申请号	DE19813142900	申请日期	1981.10.29
申请人	VEB HOCHVAKUUM DRESDEN	发明人	BOLLINGER,HELMUT;BUECKEN,BERND,DIPL.-PHYS.;SCHULZE,DIETMAR,DIPL.-PHYS.;WILBERG,RUEDIGER,DIPL.-ING.
分类号	C23C14/24;C23C14/32;C23C14/34;C23C16/26;C23C16/509;(IPC1-7):C23C11/00;C23C13/00;C23C13/08;C23C15/00	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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