| 摘要 |
PURPOSE:To simplify manufacturing and to eliminate the irregularity in performance, by integrally forming a plurality of bimorph type electrostriction elements arranged in a line in a printing direction (main scanning direction) by utilizing photolithographic technique. CONSTITUTION:A plurality of bimorph type electrostriction vibrators 11 are integrally formed to a conductive metal substrate 1 at the same positions on both surfaces of said substrate 1 so as to continue in a line by using screen printing or photolithography. Next, the punching of an outer shape and the separation of the electrostriction elements 11 at every element unit are simultaneously performed by photoetching or punching. Next, wires 13 are fixed to the electrostriction elements 11 at almost right angles to the surfaces of the leading ends of said electrostriction elements 11 by wire bonding. Because all of the electrostriction elements 11 arranged in a line are integrally molded on one plane as mentioned above, manufacturing is simple and no irregularity in performance is generated. |
