| 摘要 |
<p>PURPOSE:To facilitate data collection for inspection by providing a comparison means through which picture signals from first and second picture forming means are compared mutually while relatively moving a sample base and a defect is inspected. CONSTITUTION:An image by the design data of a memory cell 50 inputted to a comparator 41 and an image by an actual pattern enclosed to a pattern image buffer memory 42 obtained through a light-receiving element 32 are compared, and the presence of a defect is verified. Video signal processors 34, 35 and the comparator 41 are used by setting light sources 28, 29 and light- receiving elements 32, 33 at proper intervals by the cell size of a memory cell 45 or 46 transmitted from a keyboard 43 and the matrix information of the cell, a sample base 27 is further moved and the memory cells 45 are compared mutually two by two, and a cell array section 47 or 48 is compared precisely by a pattern at high speed. Accordingly, the defect of the pattern can be inspected, thus extremely facilitating the collection of design data for inspection.</p> |
