| 摘要 |
PURPOSE:To form a ferromagnetic metallic layer with the gathered body of columnar particles and to make this layer superior in corrosion resistance and wear resistance by subjecting a nonmagnetic substrate to heat treatment after an oxidizable gas is directly blown to a nonmagnetic substrate passing through the smallest incidence angle part. CONSTITUTION:After the pressure in a vacuum deposition tank is reduced by a pressure reducing means 10 provided for the tank 3, gaseous oxygen is introduced to the tank from a gaseous oxygen supply tube 11. In such state, a ferromagnetic metal 8 is made obliquely incident and is vapor-deposited on a base film 1 moving along the peripheral surface of a can 5 to form the ferromagnetic metallic layer 12 consisting of a cobalt-nickel alloy, and this film is continuously wound up around a take-up roll 6. Since the ferromagnetic metal 8 is made obliquely incident and is vapor-deposited, columnar particles 13 are obliquely generated. An intermediate layer 14 is formed around columnar particles 13. The oxygen content of the intermediate layer 14 is controlled by adjusting the quantity of introduced oxygen.
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