| 摘要 |
<p>PURPOSE:To make it possible to accomplish a high-speed response miniaturization and composite multifunctioning of a moisture sensitive element by a method wherein a thin film, consisting of tin oxide containing alkaline earth metal, is used as a humidity sensor. CONSTITUTION:The title moisture sensitive material thin film consists of the tin oxide containing an alkaline earth metal provided on a substrate. When water molecules are adsorbed in the tin oxide thin film containing the alkaline earth metal, the water molecule is partially dissociated and a proton is generated. As the quantity of the adsorbed water molecules makes a change in accordance with the variation of relative humidity, the concentration of the proton is changed according to the above-mentioned change, and a sufficient impedance change is generated in accordance with the relative humidity. As a result, a humidity sensor having a high responding speed and excellent sensitivity can be obtained, and also a small-sized composite structure or a multifunctioning structure can be accomplished in combination with other sensor.</p> |
